Micro Electro Mechanical System: - A New Challenge in Mechanical Engineering
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The emerging Micro Electro Mechanical System (MEMS) technology has enormous potential in making smaller, lighter and more functional electromechanical devices or machines at a lower cost In this article the important concept, the quickest principles of fabrication and applications in industry and in various interdisciplinary areas of Micro Electro Mechanical devices have been highlighted.Downloads
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Published
2003-07-31
How to Cite
Naskar, S. K., & Mandal, N. K. (2003). Micro Electro Mechanical System: - A New Challenge in Mechanical Engineering. Indian Science Cruiser, 17(3), 22–28. Retrieved from https://informaticsjournals.co.in/index.php/ISC/article/view/42239
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References
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R.T. Howe, and C. G. Sodini, " Micro-electronics: An Integrated Approach". Prentice Hall International Editions.
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Website: http://www.norsam.com/mems.html